Highly improved passivation of PECVD p-type TOPCon by suppressing plasma-oxidation ion-bombardment-induced damages
Dian Ma, Wei Liu, Mingjing Xiao, Zhenhai Yang, Zunke Liu, Mingdun Liao, Qingling Han, Hao Cheng, Haiyang Xing, Zetao Ding, Baojie Yan, Yude Wang, Yuheng Zeng, Jichun Ye
Topics & Concepts
PassivationPlasma-enhanced chemical vapor depositionMaterials scienceWaferPlasmaSaturation currentOpen-circuit voltageLayer (electronics)Analytical Chemistry (journal)OptoelectronicsSiliconNanotechnologyChemistryVoltageElectrical engineeringPhysicsOrganic chemistryEngineeringQuantum mechanicsSilicon and Solar Cell TechnologiesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis