Performance improvement of micro-ultrasonic motors using the thickness shear mode piezoelectric elements
Tomoaki Mashimo, Yoshinari Oba
Topics & Concepts
Ultrasonic motorPiezoelectricityPiezoelectric motorMaterials scienceTorqueAcousticsUltrasonic sensorVoltageShear (geology)ActuatorMechanical engineeringEngineeringElectrical engineeringComposite materialPhysicsThermodynamicsPiezoelectric Actuators and ControlInnovative Energy Harvesting TechnologiesAdvanced MEMS and NEMS Technologies