High-quality AlN growth on flat sapphire at relatively low temperature by crystal island shape control method
Yuheng Zhang, Jing Yang, Degang Zhao, Feng Liang, Ping Chen, Zongshun Liu
Topics & Concepts
SapphireMaterials scienceEpitaxyDislocationLayer (electronics)DiffractionChemical vapor depositionCrystal (programming language)OptoelectronicsMetalorganic vapour phase epitaxyCrystal growthFull width at half maximumMorphology (biology)Growth rateCrystallographyAnalytical Chemistry (journal)OpticsNanotechnologyComposite materialChemistryLaserGeometryMathematicsComputer scienceChromatographyProgramming languageBiologyPhysicsGeneticsGaN-based semiconductor devices and materialsZnO doping and propertiesAcoustic Wave Resonator Technologies