Flexible and high-resolution surface metrology based on stitching interference microscopy
Shanyong Chen, Wenwen Lu, Jingyang Guo, Dede Zhai, Weiwei Chen
Topics & Concepts
Image stitchingOpticsStylusSurface metrologyInterferometryInterference (communication)MetrologyMicroscopeProfilometerVignettingInterference microscopyFizeau interferometerComputer scienceWavinessAstronomical interferometerMaterials scienceLens (geology)Surface finishPhysicsComputer visionTelecommunicationsChannel (broadcasting)Composite materialOptical measurement and interference techniquesAdaptive optics and wavefront sensingOptical Coatings and Gratings