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The role of non-homogeneous barrier on the electrical performance of 15R–SiC Schottky diodes grown by in-situ RF sputtering

Satyendra Mourya, Gaurav Malik, Alisha Alisha, Brijesh Kumar, Ramesh Chandra

2022Materials Science in Semiconductor Processing13 citationsDOI

Topics & Concepts

Materials scienceThermionic emissionSchottky diodeOhmic contactSchottky barrierDiodeSilicon carbideSputteringOptoelectronicsMetal–semiconductor junctionSemiconductorSiliconNanotechnologyThin filmComposite materialLayer (electronics)PhysicsQuantum mechanicsElectronSemiconductor materials and interfacesSilicon Carbide Semiconductor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis
The role of non-homogeneous barrier on the electrical performance of 15R–SiC Schottky diodes grown by in-situ RF sputtering | Litcius