Impact of operation voltage and NH<sub>3</sub> annealing on the fatigue characteristics of ferroelectric AlScN thin films grown by sputtering
Kyung Do Kim, Yong Bin Lee, Suk Hyun Lee, In Soo Lee, Seung Kyu Ryoo, Seung Yong Byun, Jae Hoon Lee, Cheol Seong Hwang
Abstract
This work investigates the impact of the switching ratio and NH 3 annealing on the fatigue characteristics of AlScN thin film.
Topics & Concepts
Materials scienceAnnealing (glass)FerroelectricityThin filmTemperature cyclingVoltagePolarization (electrochemistry)ImpuritySputteringComposite materialOptoelectronicsCyclingThermalNanotechnologyElectrical engineeringChemistryOrganic chemistryPhysical chemistryMeteorologyArchaeologyEngineeringPhysicsDielectricHistoryAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsMetal and Thin Film Mechanics