Effects of different metal electrodes on the ferroelectric properties of HZO thin films
Pei Xu, Shaoan Yan, Yingfang Zhu, Junyi Zang, Penghong Luo, Gang Li, Qiong Yang, Zhuojun Chen, Wanli Zhang, Xuejun Zheng, Minghua Tang
Topics & Concepts
FerroelectricityMaterials scienceCapacitorElectrodePolarization (electrochemistry)Atomic layer depositionThin filmOptoelectronicsElectric fieldLeakage (economics)Analytical Chemistry (journal)VoltageNanotechnologyElectrical engineeringDielectricChemistryPhysical chemistryChromatographyPhysicsQuantum mechanicsMacroeconomicsEconomicsEngineeringFerroelectric and Negative Capacitance DevicesMXene and MAX Phase MaterialsSemiconductor materials and devices