Low dielectric silsesquioxane-modified benzocyclobutene composites
Meng Xie, Guodong Li, Wenjie Fan, Menglu Li, Quan Sun, Jin Guo, Shuang Xia, Wenxin Fu
Topics & Concepts
BenzocyclobuteneMaterials scienceDielectricThermosetting polymerThermal stabilityComposite materialSilsesquioxaneChemical-mechanical planarizationDielectric lossCuring (chemistry)Polymer chemistryChemical engineeringPolymerPolishingEngineeringOptoelectronicsSilicone and Siloxane ChemistrySynthesis and properties of polymersCopper Interconnects and Reliability