High mobility cerium-doped indium oxide thin films prepared by reactive plasma deposition without oxygen
Yanping Zhang, Yu Gan, Gan Tian, Lili Wu, Jingquan Zhang, Xia Hao, Dewei Zhao
Topics & Concepts
IndiumDopingCerium oxideMaterials scienceCeriumOxygenDeposition (geology)Thin filmOxidePlasmaChemical engineeringInorganic chemistryChemistryNanotechnologyOptoelectronicsMetallurgyOrganic chemistrySedimentBiologyPhysicsEngineeringPaleontologyQuantum mechanicsZnO doping and propertiesThin-Film Transistor TechnologiesCopper-based nanomaterials and applications