Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry
Yusheng Bian, Javier Ayala, Colleen Meagher, Bo Peng, Michał Rakowski, Ajey P. Jacob, Karen Nummy, Andy Stricker, Zoey Sowinski, Aslı Şahin, Abdelsalam Aboketaf, Shuren Hu, Ian Stobert, Kate McLean, Louis Medina, Kevin Dezfulian, Brendan Harris, Subramanian Krishnamurthy, Thomas Houghton, Won Suk Lee, Massimo Sorbara, Dave Riggs, Ted Letavic, Anthony W. Yu, Ken Giewont, John Pellerin
Abstract
We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.
Topics & Concepts
CMOSPhotonicsSilicon photonicsFoundryMaterials scienceReduction (mathematics)SiliconOptoelectronicsElectronic engineeringEngineeringMetallurgyGeometryMathematicsPhotonic and Optical DevicesOptical Network TechnologiesAdvanced Photonic Communication Systems