Atomic Layer Etching Applications in Nano-Semiconductor Device Fabrication
Dae Sik Kim, Jae Bin Kim, Da Won Ahn, Jin Hyun Choe, Jin Seok Kim, Eun Su Jung, Sung Gyu Pyo
Topics & Concepts
Materials scienceAtomic layer depositionSemiconductorEtching (microfabrication)NanotechnologySemiconductor device fabricationLayer (electronics)OptoelectronicsReactive-ion etchingDry etchingWaferSemiconductor materials and devicesZnO doping and propertiesPlasma Diagnostics and Applications