Insights into the nucleation, grain growth and phase transformation behaviours of sputtered metastable β-W films
Shuqun Chen, Jinshu Wang, Ronghai Wu, Zheng Wang, Yangzhong Li, Yiwen Lu, Wenyuan Zhou, Peng Hu, Hongyi Li
Topics & Concepts
NucleationMaterials sciencePhase (matter)MetastabilityTungstenSputteringSurface energySubstrate (aquarium)Sputter depositionCrystallographyElectron diffractionGibbs free energyCondensed matter physicsChemical physicsThermodynamicsDiffractionThin filmNanotechnologyComposite materialChemistryMetallurgyOpticsGeologyOceanographyPhysicsOrganic chemistryMetal and Thin Film MechanicsMicrostructure and mechanical propertiesCopper Interconnects and Reliability