Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform
Jiadi Zhu, Ji Hoon Park, Steven A. Vitale, Wenjun Ge, Gang Seob Jung, Jiangtao Wang, Mohamed Mokhtar Mohamed, Tianyi Zhang, Maitreyi Ashok, Mantian Xue, Xudong Zheng, Zhien Wang, Jonás Hansryd, Anantha P. Chandrakasan, Jing Kong, Tomás Palacios
Topics & Concepts
Materials scienceWaferMolybdenum disulfideSiliconMonolayerOptoelectronicsNanotechnologyChemical vapor depositionBack end of lineCMOSComposite materialLayer (electronics)2D Materials and ApplicationsNanowire Synthesis and ApplicationsGraphene research and applications