First demonstration of hetero-epitaxial ε-Ga2O3 MOSFETs by MOCVD and a F-plasma surface doping
Weiqu Chen, Haoxun Luo, Zimin Chen, Yanli Pei, Gang Wang, Xing Lü
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyEpitaxyChemical vapor depositionDopingAnalytical Chemistry (journal)Substrate (aquarium)Scanning electron microscopeOptoelectronicsSheet resistanceMOSFETElectron mobilityTransistorNanotechnologyChemistryLayer (electronics)VoltageElectrical engineeringOceanographyEngineeringGeologyChromatographyComposite materialGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques