Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy
Wei Xu, Xiaoyi Wang, Xu Zhao, Izhar Izhar, Yi-Kuen Lee
Abstract
In this paper, we report a two-dimensional (2D) Thermoresistive Micro Calorimetric Flow (TMCF) sensor by using a 0.35 μm 2P4M CMOS MEMS technology. For the airflow, the fabricated and the open-space packaged 2D flow sensor system achieved the highest normalized sensitivity of 32 mV/W/(m/s) with respect to input heating power and gain. To overcome the sensor output drifting issue due to the locally redistributed fluid flow near the bonding wires, a digital signal conditioning algorithm using the inverse distance weighting (IDW) method, instead of the conventional fitting method with sine and cosine function, was proposed. Accordingly, the calibrated 2D flow sensor showed an improved velocity accuracy of ±4% and the angle accuracy of ±3° for an input airflow from 0 to 20 m/s. Therefore, the developed highly sensitive 2D TMCF sensor will be a promising device for the airflow measurement in the smart buildings and the meteorological monitoring system.