A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor
Jiao Bai, Jingwen Li, Xiaohao Wang, Qian Zhou, Kai Ni, Xinghui Li
Topics & Concepts
Materials scienceOpticsSpecular reflectionWavelengthRefractive indexReflectivityBidirectional reflectance distribution functionOptoelectronicsPhysicsOptical Polarization and EllipsometryColor Science and ApplicationsCalibration and Measurement Techniques