Heterogeneous wafer bonding of ultra-wide bandgap Ga2O3: A review
Xiao Qin, Jieqiong Zhang, Jun Liu, Bo Zhao, Chengguo Li, Qian Wan, Cong Jiang, Jiayun Wei, Wei Han, Baoyuan Wang, Lin Lv, Chen Xu, Houzhao Wan, Hao Wang, Houzhao Wan, Hao Wang
Topics & Concepts
Materials scienceWaferBand gapOptoelectronicsNanotechnologyWafer bondingEngineering physicsEngineeringGa2O3 and related materialsSemiconductor materials and devicesZnO doping and properties