Structural and tribomechanical properties of Cr-DLC films deposited by reactive high power impulse magnetron sputtering
Jun Zheng, Jiale Shang, Wenjian Zhuang, Ji Cheng Ding, Haijuan Mei, Ying Yang, Songlin Ran
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSurface roughnessSputter depositionBiasingSputteringAnalytical Chemistry (journal)TribologyIonSiliconSurface finishComposite materialThin filmVoltageMetallurgyNanotechnologyChemistryElectrical engineeringEngineeringOrganic chemistryChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives