Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis(diethylamino)silane and ozone
Hyeonsu Roh, Hye-Lee Kim, Khabib Khumaini, Heeju Son, Donggeon Shin, Won‐Jun Lee
Topics & Concepts
Quartz crystal microbalanceSilaneAtomic layer depositionChemistrySiliconAnalytical Chemistry (journal)Deposition (geology)VicinalOxideChemical vapor depositionInorganic chemistryDensity functional theoryLayer (electronics)Physical chemistryAdsorptionComputational chemistryOrganic chemistryBiologySedimentPaleontologySemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties