Tunable synthesis, characterization, and CMP performance of dendritic mesoporous silica nanospheres as functionalized abrasives
Ailian Chen, Shirui Wang, Wenjie Cai, Zhaoyu Mu, Yang Chen
Topics & Concepts
Materials scienceScanning electron microscopeSurface roughnessNanoindentationComposite materialChemical engineeringMesoporous materialFourier transform infrared spectroscopyMesoporous silicaNanotechnologyChemistryOrganic chemistryCatalysisEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications