Enhanced adsorption purification of fluoromethane electronic gas using carbon adsorbent with rich ultramicroporosity
Xuan Wei, Shengjun Du, Jiawu Huang, Junjie Peng, Jiamin Liao, Z. Fu, Yanshan Chen, Zewei Liu, Guang Miao, Neng Liao, Jing Xiao
Topics & Concepts
AdsorptionMicroporous materialSelectivityChemistryVolume (thermodynamics)Carbon fibersImpurityOutgassingActivated carbonAnalytical Chemistry (journal)Chemical engineeringMaterials scienceChromatographyPhysical chemistryOrganic chemistryCatalysisComposite materialThermodynamicsPhysicsComposite numberEngineeringInorganic Fluorides and Related CompoundsCarbon Dioxide Capture TechnologiesPer- and polyfluoroalkyl substances research