Monolithic InGaN/GaN photonic chips for heart pulse monitoring
Liang Chen, Yiping Wu, Kwai Hei Li
Abstract
Photo-plethysmography (PPG) making use of a monochromic light source and a photoelectric sensor is a non-invasive detection method to record blood volume changes in vessels and can be used to extract cardiac-related heart pulse information. Here, we demonstrated the fabrication of a monolithic photonic chip by integrating light-emitting diodes (LEDs) with photodetectors (PDs) on the same GaN-on-sapphire wafer containing InGaN/GaN multi-quantum wells (MQWs). The MQWs simultaneously act as light emitters in the LEDs and detectors in the PDs, and their mechanism has been studied. The fabricated chip operating in reflection mode is flip-chip bonded on a flexible polydimethylsiloxane (PDMS) strip, enabling the sapphire surface in close contact with the skin. The optical and electrical properties of the LED and PD have been thoroughly characterized, confirming that the PDs using identical MQWs can detect the reflected light from the LEDs. By attaching the chip to the wrist, PPG heart pulse signals from the arterial blood flow can be obtained, thereby verifying the feasibility of the proposed monolithic chip.