Mechanism study of low-resistance ohmic contact in Cr/Au electrodes on (100) β-Ga2O3 substrate with rapid thermal annealing
Xin Qi, Yi Shen, Chengxi Ding, Yuanhui Zuo, Qilong Yuan, Lin Gu, Shengnan Zhang, Xiaoqing Huo, Qing‐Chun Zhang, Hong-Ping Ma
Topics & Concepts
Ohmic contactAnnealing (glass)Materials scienceElectrodeContact resistanceMetallurgyChemistryPhysical chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques