Plasma-enhanced chemical vapor deposition of TiB2 and TiBN hard coatings using BBr3
Farid Movassagh-Alanagh, Amir Abdollah-zadeh, Maryam Alizadeh Zolbin, Narguess Nemati, Ramin Aghababaei
Topics & Concepts
Chemical vapor depositionMaterials scienceChemical engineeringPlasmaDeposition (geology)NanotechnologyPhysicsPaleontologyQuantum mechanicsSedimentBiologyEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites