SiOC films on C/C composite prepared by chemical vapor deposition with hexamethyldisilazane precursor
Xiumei Wu, Shu Yu, Yunping Li
Topics & Concepts
Materials scienceChemical vapor depositionDeposition (geology)Isothermal processComposite numberMicrostructureSubstrate (aquarium)Chemical engineeringSiliconThin filmOxygenCombustion chemical vapor depositionMorphology (biology)Composite materialCarbon filmNanotechnologyMetallurgyOrganic chemistryChemistryGeologyThermodynamicsBiologyPhysicsPaleontologySedimentGeneticsEngineeringOceanographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced ceramic materials synthesis