Effects of trivalent lanthanide (La and Nd) doped ceria abrasives on chemical mechanical polishing
Eungchul Kim, Jae‐Won Lee, Chulwoo Bae, Hyunho Seok, Hyeong‐U Kim, Taesung Kim
Topics & Concepts
LanthanideDopantMaterials scienceDopingChemical-mechanical planarizationPolishingChemical engineeringInorganic chemistryNanoparticleIonMetallurgyNanotechnologyChemistryOrganic chemistryOptoelectronicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites