Growth and nitridation of β-Ga2O3 thin films by Sol-Gel spin-coating epitaxy with post-annealing process
Yuxia Zhu, Xiangqian Xiu, Fei Cheng, Yuewen Li, Zili Xie, Tao Tao, Peng Chen, Bin Liu, Rong Zhang, Youdou Zheng
Topics & Concepts
Materials scienceCrystallinityThin filmAnnealing (glass)SapphireSpin coatingEpitaxySol-gelComposite materialOptoelectronicsLayer (electronics)NanotechnologyOpticsLaserPhysicsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques