Precise tailoring of multiple nanostructures based on atomic layer assembly via versatile soft-templates
Guangzhou Geng, Wei Zhu, Ruhao Pan, Zhongshan Zhang, Changzhi Gu, Junjie Li
Topics & Concepts
NanolithographyTemplateNanotechnologyNanostructureMaterials scienceLithographyFabricationNanoscopic scaleEtching (microfabrication)Soft lithographyLayer (electronics)Atomic layer depositionScalabilityComputer scienceOptoelectronicsDatabasePathologyAlternative medicineMedicineGas Sensing Nanomaterials and SensorsZnO doping and propertiesMetamaterials and Metasurfaces Applications