Low peak power deposition regime in HiPIMS: Deposition of hard and dense nanocomposite Ti-Si-N films by DOMS without the need of energetic bombardment
Filipe Fernandes, S. Calderon V., Paulo J. Ferreira, A. Cavaleiro, J.C. Oliveira
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceNanocompositeDeposition (geology)Sputter depositionThin filmPhysical vapor depositionSputteringComposite materialNanotechnologyAnalytical Chemistry (journal)ChromatographyBiologyPaleontologyChemistrySedimentMetal and Thin Film MechanicsSemiconductor materials and devicesIon-surface interactions and analysis