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Learning from single-defect wafer maps to classify mixed-defect wafer maps

Jaewoong Shim, Seokho Kang

2023Expert Systems with Applications28 citationsDOI

Topics & Concepts

WaferComputer scienceArtificial intelligencePattern recognition (psychology)Noise (video)Convolutional neural networkData miningMaterials scienceOptoelectronicsImage (mathematics)Industrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure Analysis
Learning from single-defect wafer maps to classify mixed-defect wafer maps | Litcius