A novel defect detection method with eliminating dust for specular surfaces based on structured-light modulation analysis technique
Yiyang Huang, Jie Wang, Yiping Song, Huimin Yue, Yuyao Fang, Yong Liu
Topics & Concepts
PolarizerSpecular reflectionWaferOpticsMaterials scienceModulation (music)Computer sciencePolarization (electrochemistry)OptoelectronicsAcousticsPhysicsChemistryBirefringencePhysical chemistryOptical measurement and interference techniquesIndustrial Vision Systems and Defect DetectionSurface Roughness and Optical Measurements