Carbon-rich amorphous silicon carbide and silicon carbonitride films for silicon-based photoelectric devices and optical elements: Application from UV to mid-IR spectral range
Bo Sha, Anatolii Lukianov, Mykhailo Dusheіko, V.B. Lozinskii, Andriy N. Klyui, D. V. Korbutyak, S. E. Pritchin, NickolaiI. Klyui
Topics & Concepts
SiliconMaterials scienceAmorphous siliconSilicon carbideAmorphous solidSilicon nitrideSilicon monoxideCarbideSilaneOptoelectronicsCrystalline siliconComposite materialChemistryOrganic chemistryDiamond and Carbon-based Materials ResearchThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence