Tunable dielectric properties of a parylene dielectric layer through surface-modulation by click chemistry
Seong Cheol Jang, Gunoh Lee, I.J. Park, Byeongil Noh, Jimin Park, Jaewon Lee, Kyung Jin Lee, Hyun‐Suk Kim
Abstract
Ethynyl parylene, fabricated via CVD, modulates dielectric properties through azide/alkyne click reactions. Surface modification increases the dielectric constant, leading to drain current variation in TFTs, enabling its use as a sensor device.
Topics & Concepts
Materials scienceParyleneDielectricClick chemistryLayer (electronics)Modulation (music)OptoelectronicsChemical engineeringComposite materialPolymerPolymer chemistryEngineeringAestheticsPhilosophyMolecular Junctions and NanostructuresNeuroscience and Neural EngineeringNanofabrication and Lithography Techniques