Preparation of pure NiO thin film by radio frequency magnetron sputtering technique and investigation on its properties
K. Usha, R. Sivakumar, C. Sanjeeviraja
Topics & Concepts
Materials scienceNon-blocking I/OSputter depositionThin filmSputteringRadio frequencyHigh-power impulse magnetron sputteringOptoelectronicsEngineering physicsNanotechnologyTelecommunicationsComputer scienceChemistryBiochemistryEngineeringCatalysisTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties