Litcius/Paper detail

In situ ellipsometry monitoring of TiO<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math> atomic layer deposition from Tetrakis(dimethylamido)titanium(IV) and H<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math>O precursors on Si and In<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si4.svg"><mml:msub><mml:mrow/><mml:mrow><mml:mn>0.53</mml:mn></mml:mrow></mml:msub></mml:math>Ga<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si5.svg"><mml:msub><mml:mrow/><mml:mrow><mml:mn>0.47</mml:mn></mml:mrow></mml:msub></mml:math>As substrates

E. V. Skopin, Khasan Abdukayumov, Petros Abi Younes, Mikhail Anikin, Hervé Roussel, Jean‐Luc Deschanvres, H. Renevier

2021Thin Solid Films13 citationsDOIOpen Access PDF

Topics & Concepts

X-ray photoelectron spectroscopyEllipsometryAnalytical Chemistry (journal)Atomic layer depositionStoichiometryAnataseMaterials scienceThin filmChemistryNanotechnologyChemical engineeringChromatographyPhysical chemistryCatalysisEngineeringBiochemistryPhotocatalysisSemiconductor materials and devicesElectronic and Structural Properties of OxidesCatalytic Processes in Materials Science
In situ ellipsometry monitoring of TiO<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math> atomic layer deposition from Tetrakis(dimethylamido)titanium(IV) and H<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:msub><mml:mrow/><mml:mn>2</mml:mn></mml:msub></mml:math>O precursors on Si and In<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si4.svg"><mml:msub><mml:mrow/><mml:mrow><mml:mn>0.53</mml:mn></mml:mrow></mml:msub></mml:math>Ga<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si5.svg"><mml:msub><mml:mrow/><mml:mrow><mml:mn>0.47</mml:mn></mml:mrow></mml:msub></mml:math>As substrates | Litcius