Atomic layer deposition meets metal–organic frameworks
Zhongchao Zhou, Lina Xu, Yi‐hong Ding, Hong‐Ping Xiao, Qian Shi, Xin‐Hua Li, Aidong Li, Guoyong Fang
Topics & Concepts
Atomic layer depositionMaterials scienceMetal-organic frameworkNanotechnologyNanomaterialsOxideAdsorptionCatalysisMetalPorosityChemical engineeringThin filmChemistryOrganic chemistryMetallurgyEngineeringComposite materialSemiconductor materials and devicesZnO doping and propertiesCatalytic Processes in Materials Science