Novel rotary chemical mechanical polishing on an integral impeller
Longxing Liao, Zhenyu Zhang, Fanning Meng, Dongdong Liu, Jie Liu, Yubiao Li, Xiangxiang Cui
Topics & Concepts
PolishingMaterials scienceImpellerChemical-mechanical planarizationSlurrySurface roughnessSurface finishGrindingComposite materialMechanical engineeringEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques