Dynamic spectroscopic imaging ellipsometry
Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Chulmin Joo, Robert Magnusson
Abstract
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm 2 in an hour.
Topics & Concepts
OpticsEllipsometryMaterials scienceInterferometryUltrashort pulseWaferRefractive indexImage resolutionPhase (matter)MetrologyPhase modulationPhase matchingPhase imagingResolution (logic)OptoelectronicsSpatial frequencySpectroscopyAstronomical interferometerStray lightPhase retrievalPolarization (electrochemistry)Chemical imagingTemporal resolution3D optical data storagePtychographyWavefrontOptical Polarization and EllipsometryOptical Coatings and GratingsDigital Holography and Microscopy