Magnetron sputtering deposition of silicon nitride on polyimide separator for high-temperature lithium-ion batteries
Can Liao, Wei Wang, Junling Wang, Longfei Han, Shuilai Qiu, Lei Song, Zhou Gui, Yongchun Kan, Yuan Hu
Topics & Concepts
Separator (oil production)Materials scienceSputter depositionPolyimideThermal stabilitySputteringSilicon nitrideCoatingSiliconNitrideChemical engineeringOptoelectronicsNanotechnologyThin filmLayer (electronics)ThermodynamicsEngineeringPhysicsAdvancements in Battery MaterialsAdvanced Battery Materials and TechnologiesSupercapacitor Materials and Fabrication