A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance
Youngju Kim, Hoyeop Lee, Chang Ouk Kim
Topics & Concepts
AutoencoderProcess (computing)Semiconductor device fabricationFeature (linguistics)Fault detection and isolationFault (geology)Field (mathematics)Computer scienceArtificial intelligenceData miningPattern recognition (psychology)EngineeringMathematicsArtificial neural networkElectrical engineeringGeologySeismologyLinguisticsWaferOperating systemActuatorPhilosophyPure mathematicsIndustrial Vision Systems and Defect DetectionFault Detection and Control SystemsAdvanced Statistical Process Monitoring