Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing
Nian Liu, Hideaki Yamada, Naoya Yoshitaka, Kentaro Sugimoto, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
Topics & Concepts
PolishingCathodoluminescenceDiamondFull width at half maximumMaterials scienceRaman spectroscopySubstrate (aquarium)LuminescenceDislocationCrystal (programming language)Analytical Chemistry (journal)OpticsChemistryOptoelectronicsComposite materialProgramming languageChromatographyPhysicsComputer scienceOceanographyGeologyDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesIon-surface interactions and analysis