Influence of nitrogen partial pressure on structure, mechanical and tribological properties of TaCN coatings
Wenzheng Li, Zhiwei Yuan, Yebiao Zhu, Wuming Guo, Yongxin Wang, Haixin Wang, Jinlong Li
Topics & Concepts
Materials scienceCrystallinityTribologyCoatingAmorphous solidComposite materialPartial pressureCrystal (programming language)NitrogenSputter depositionVolumetric flow rateCrystal structureSputteringNanotechnologyThin filmCrystallographyOxygenThermodynamicsOrganic chemistryProgramming languagePhysicsComputer scienceChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites