Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide
A. O. Zamchiy, Е. А. Баранов, Sergey V. Starinskiy, N. A. Lunev, I. E. Merkulova
Topics & Concepts
SuboxideDewettingMaterials scienceThin filmSiliconCrystallizationRaman spectroscopyAmorphous solidTransmission electron microscopyPolycrystalline siliconCrystalliteAnnealing (glass)Layer (electronics)Amorphous siliconNanocrystalline siliconSubstrate (aquarium)Chemical engineeringNanotechnologyCrystallographyCrystalline siliconComposite materialOptoelectronicsThin-film transistorOpticsChemistryMetallurgyOceanographyPhysicsGeologyEngineeringThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceFluid Dynamics and Thin Films