Improving the thermoelectric properties of thick Sb2Te3 film via Cu doping and annealing deposited by DC magnetron sputtering using a mosaic target
Nattharika Theekhasuk, Rachsak Sakdanuphab, Pilaipon Nuthongkum, Prayoonsak Pluengphon, Adul Harnwunggmoung, Mati Horprathum, Pichet Limsuwan, Aparporn Sakulkalavek, Pisan Sukwisute
Topics & Concepts
Materials scienceThermoelectric effectDopingSeebeck coefficientSputter depositionCrystalliteAnnealing (glass)MicrostructureSputteringAnalytical Chemistry (journal)Electrical resistivity and conductivityImpurityThin filmMetallurgyOptoelectronicsComposite materialNanotechnologyThermal conductivityChemistryElectrical engineeringThermodynamicsOrganic chemistryEngineeringPhysicsChromatographyAdvanced Thermoelectric Materials and DevicesOptical properties and cooling technologies in crystalline materialsChalcogenide Semiconductor Thin Films