Dual-spectrum bands compatible Ti-Si-O film prepared by magnetron co-sputtering
Haojie Luo, Xiaomeng Fan, Jianyong Tu, Jiangyi He, Xin Li, Jimei Xue, Fang Ye, Laifei Cheng
Topics & Concepts
EmissivityMaterials scienceLow emissivityMicrowaveInfraredTransmittanceSputter depositionAnnealing (glass)OptoelectronicsAmorphous solidSputteringCavity magnetronOpticsLayer (electronics)Thin filmComposite materialNanotechnologyChemistryCrystallographyPhysicsQuantum mechanicsElectromagnetic wave absorption materialsAdvanced Antenna and Metasurface TechnologiesZnO doping and properties