Wake-up-free ferroelectric Hf0.5Zr0.5O2 thin films characterized by precession electron diffraction
Teng-Jan Chang, Hsing-Yang Chen, Chin-I Wang, Hsin-Chih Lin, Chen-Feng Hsu, Jer‐Fu Wang, Chih‐Hung Nien, Chih‐Sheng Chang, Iuliana Radu, Miin‐Jang Chen, Miin‐Jang Chen
Topics & Concepts
FerroelectricityMaterials scienceMonoclinic crystal systemThin filmTetragonal crystal systemOrthorhombic crystal systemDiffractionPhase (matter)SemiconductorCrystallographyOpticsOptoelectronicsNanotechnologyDielectricCrystal structureChemistryPhysicsOrganic chemistryFerroelectric and Negative Capacitance DevicesMXene and MAX Phase MaterialsSemiconductor materials and devices