Azoles as corrosion inhibitors in alkaline medium for ruthenium chemical mechanical planarization applications:Electrochemical and theoretical analysis
Nikhil Rahul Dhongde, Nipu Kumar Das, Jenasree Hazarika, Jin-Goo Park, Tamal Banerjee, Prasanna Venkatesh Rajaraman
Topics & Concepts
ChemistryChemical-mechanical planarizationElectrochemistryRutheniumCorrosionCombinatorial chemistryChemical engineeringNanotechnologyOrganic chemistryPhysical chemistryElectrodeEngineeringLayer (electronics)Materials scienceCatalysisAdvanced Surface Polishing TechniquesCorrosion Behavior and InhibitionSemiconductor materials and devices