Effect of thermal annealing on the structural and optical properties of ZnGa2O4 films deposited on sapphire by magnetron sputtering
Yangmei Xin, Z. Gao, Xiao Shang, Jiasen Wu, Dan Yu, Junshan Xiu, Zhao Li
Topics & Concepts
SapphireMaterials scienceSputter depositionAnnealing (glass)OptoelectronicsCavity magnetronSputteringHigh-power impulse magnetron sputteringThermalThin filmOpticsComposite materialNanotechnologyLaserPhysicsMeteorologyGa2O3 and related materialsZnO doping and propertiesLuminescence Properties of Advanced Materials