Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
Yoonseo Jang, Dohwan Jung, Prakash R. Sultane, Eric S. Larsen, Christopher W. Bielawski, Jungwoo Oh
Topics & Concepts
Beryllium oxideAtomic layer depositionMaterials scienceThin filmDielectricBand gapWurtzite crystal structureSubstrate (aquarium)OptoelectronicsPhysical vapor depositionAnalytical Chemistry (journal)NanotechnologyBerylliumMetallurgyChemistryZincOceanographyChromatographyGeologyOrganic chemistrySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesElectronic and Structural Properties of Oxides