Microstructure, hardness and optical properties of Er2O3 films deposited on diamond-coated and Si(100) substrates by radio frequency magnetron sputtering
Yabo Huang, Liangxian Chen, Jia Xin, Mingyang Shao, Siwu Shao, Xiaohua Zhu, Kang An, Jinlong Liu, Junjun Wei, Chengming Li
Topics & Concepts
Materials scienceMonoclinic crystal systemSputter depositionMicrostructureThin filmNanoindentationAmorphous solidTransmission electron microscopyDiamondSputteringAnalytical Chemistry (journal)OpticsComposite materialCrystallographyNanotechnologyChemistryCrystal structureChromatographyPhysicsDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of OxidesHigh-pressure geophysics and materials